Tungsten target materials are typically based on high-purity tungsten, sometimes alloyed with elements such as titanium, tantalum, or nickel to optimize specific properties. As a refractory metal, tungsten features a high melting point and excellent hardness, enabling it to remain stable in high-temperature and high-energy environments. Its body-centered cubic crystal structure provides high density and mechanical strength, allowing it to withstand the intense ion bombardment during sputtering without deforming or fracturing. Additionally, tungsten’s good chemical stability offers excellent resistance to…